|Type:||Ceramic Tubes||Material:||Silicon Carbide|
|Color:||Black / Grey||Density:||≥3.02g/cm3|
|Size:||Customers' Requests||Usage:||Semiconductor Wafer Loading Device|
|Working Temperature:||1380℃||Item:||Silicon Bonded Silicon Carbide Ceramic Tube And Pipe,silicon Nitride Pipe,NBSC|
|Bending Strength 20℃:||250MPa||Open Porosity:||<0.1%|
silicon carbide beams,
ceramic burner nozzle
Reaction sintered silicon carbide paddles used to semiconductor wafer loading system
The reaction sintered silicon carbide cantilever slurry is a key part of the semiconductor wafer loading system. It is mainly used in the photovoltaic new energy industry. During the application of polycrystalline silicon wafers or single-crystal silicon wafers in the dismantling furnace, the loading and transportation of silicon wafers in high temperature environments (1000-1300 ° C), Product specifications can be customized according to customer requirements.
Silicon carbide paste for photovoltaic new energy industry. The main specifications are 2378mm, 25550mm, 2660mm, etc. It is used in the diffusion furnace to coat polycrystalline silicon wafers or single crystal silicon wafers (diffusion) in the process of coating and transporting silicon wafers in high temperature environments.
Cantilever slurry has stable performance, does not change shape under high temperature environment, and has large wafer loading force, which is suitable for robotic automatic loading and handling system. Because the cantilever slurry surface is stable and not deformed, it becomes possible to use the existing furnace tubes to prepare larger specifications of round tubes.
The thermal expansion coefficient of cantilever slurry is similar to that of LPCVD coating, and it is applied to LPCVD, which greatly prolongs the maintenance and cleaning cycle and greatly reduces pollutants.
|SISIC Technical Date|
|Max temperature of application||ºC||1380|
|Modulus of elasticity||Gpa||330(20ºC)|
|Coefficient of thermal expansion||K-1×10-6||4.5|
Photos of Sisic silicon carbide paddle
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WEIFANG BETTER CERAMIC CO., LTD
hot tag:silicon carbide beams;sisic roller,pipe,tube,china reaction boned silicon carbide
Contact Person: Yui